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| 3dnand-case.md [2026/06/22 15:26] – [Plants] gauthier.roussilhe.ext | 3dnand-case.md [2026/06/22 15:28] (current) – [Archetype recipe] gauthier.roussilhe.ext | ||
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| ## Archetype recipe | ## Archetype recipe | ||
| - | ### Total number of steps | + | |
| + | ### Total number of steps (front-end) | ||
| The total number of process steps depends of the number of layers on the 3D NAND die. Each layer adds 6 process steps. | The total number of process steps depends of the number of layers on the 3D NAND die. Each layer adds 6 process steps. | ||
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| **x** = x | **x** = x | ||
| - | **b** = x | + | **b** = |
| + | x | ||
| ### Processes distribution | ### Processes distribution | ||
| + | |||
| + | #### Fixed steps | ||
| * Cleaning: 40 (x%) | * Cleaning: 40 (x%) | ||
| Line 72: | Line 75: | ||
| * Deposition: 60 (x%) | * Deposition: 60 (x%) | ||
| * CMP: 6 (x%) | * CMP: 6 (x%) | ||
| + | |||
| + | #### Variable steps (nb of layers) | ||
| + | |||
| + | * Cleaning: x (x%) | ||
| + | * Oxidation: x (x%) | ||
| + | * Photolithography: | ||
| + | * Etching: x (x%) | ||
| + | * Doping: x (x%) | ||
| + | * Deposition: x (x%) | ||
| + | * CMP: x (x%) | ||
| ## Process flow for 3D-NAND Flash | ## Process flow for 3D-NAND Flash | ||