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glossary.md [2026/03/27 11:00] – created eric.fourboul.extglossary.md [2026/03/27 16:11] (current) eric.fourboul.ext
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-Glossary+#Glossary 
 + 
 +##Fabrication 
 +Fabrication (or Manufacturing)is the process of building circuits on a silicon wafer in a cleanroom environment where all aspects of production (temperature, power, chemistries, moisture, contamination, etc.) are tightly controlled. It take 40 to 150 days to complete the fabrication process.  
 + 
 +##Cleanroom 
 +Cleanroom is a room that has HEPA (High Efficiency Particulate Air) filtration to remove 
 +particles from the air. Cleanrooms are used for manufacturing where high levels of 
 +cleanliness and sterility are required. Common applications of the cleanroom 
 +include manufacturing of medical devices, pharmaceuticals, and semiconductors. 
 + 
 +##Chemical mechanical planarization (CMP)  
 +CMP is used to smooth the surface of wafers following other manufacturing steps, such as etching and cleaning. CMP allow a new layer of features to be added. 
 + 
 +##Cleaning 
 +Cleaning involves removing residues left on the wafer by the etching process. 
 + 
 +##Deposition 
 +Deposition adds thin films of materials on a wafer to become parts of chips. Techniques include chemical vapor deposition, physical vapor deposition, electrochemical coating, spin-coating, rapid thermal processing, and tube- based diffusion and deposition. 
 + 
 +###CVD 
 +Chemical vapor deposition (CVD) tools create a chemical vapor that deposits films on the wafer atom-by-atom or molecule-by-molecule.  
 + 
 +###PVD 
 +Physical vapor deposition (PVD) tools vaporize a solid or liquid material, which then condenses onto a substrate. The primary PVD method is called "sputtering." 
 + 
 +###RTP 
 +Rapid thermal processing (RTP) is critical to several steps in chip manufacturing. RTP tools include lamps, lasers, or other mechanisms to quickly increase the temperature of a wafer in order to change its properties.  
 + 
 +###Spin-coating 
 +These tools spin a wafer to spread liquid material deposited on the wafer across it. Spin-coating is used extensively in photoresist coating but only for narrow applications in chip production. 
 + 
 +###tube-based diffusion and deposition 
 +Tube-based diffusion and deposition systems are called "tube‚"-based because substrates are loaded in cylindrical chambers for processing, either causing diffusion of dopants into a wafer (tube diffusion systems) or depositing materials for particular applications (tube deposition systems). 
 + 
 +##Design 
 +Design determines the layout of transistors and wiring on a chip to be manufactured. 
 + 
 +##DRAM 
 +Dynamic random-access memory (DRAM) is a memory chip that stores data while a computer operates, but loses it when the computer powers down. 
 + 
 +##EDA 
 +Electronic design automation (EDA) software is used to design chips. 
 + 
 +##Etching 
 +Etching tools are used to create permanent patterns on chips: after photolithography has removed certain parts of a photoresist deposited on a wafer according to a specific pattern, the etching tools etch this pattern into a permanent substrate bellow. Dry etching and wet etching use a gas and a liquid, respectively, for the etching process. 
 + 
 +##FPGA 
 +Field-programmable gate arrays (FPGAs) are logic chips that can be reprogrammed after deployment to suit specific calculations. 
 + 
 +##Foundries 
 +Foundries are semiconductor manufacturing facilities that manufacture chips for third-party customers. 
 + 
 +##GPU 
 +Graphics processing units (GPUs) are specialized logic chips used most commonly for graphics processing and developing artificial intelligence algorithms. 
 + 
 +##Photolithography 
 +In photolithography, light is used to draw patterns into semiconductor wafers, creating the tiny circuits that comprise logic chips. A photolithography tool passes light through a photomask-a transparent plate with a circuit pattern-to transfer that pattern to a wafer coated with photoresist chemical. The light dissolves parts of the photoresist according to the circuit pattern. 
 + 
 +###ArF dry (DUV) 
 +ArF (Argon hexa Fluoride) dry lithography scanners are advanced deep ultraviolet (DUV) photolithography tools used in high-volume semiconductor manufacturing. 
 + 
 +###ArF immersion (DUV) 
 +Immersion ArF is the same as dry ArF except the Scanner lens is immersed in a fluid, typically water.  
 + 
 +###KrF (DUV) lithography tools 
 +KrF lithography tools are deep ultraviolet (DUV) photolithography tools that use 248 nm wavelength light from krypton fluoride lasers to pattern semiconductor features for mature node semiconductors.  
 + 
 +###i-line lithography tools 
 +i-line lithography tools are ultraviolet (UV) photolithography systems used in semiconductor manufacturing for mature process nodes. 
 + 
 +###EUV lithography tools 
 +EUV lithography tools are the most advanced photolithography equipment currently used in mass semiconductor production. They are the only tools combining leading-edge precision (by producing light with small wavelengths) with high throughput (by using photomasks), and are necessary for mass-producing the most advanced logic chips. 
 + 
 +##IDM 
 +Integrated device manufacturers (IDMs) are firms that perform all three steps of production: design; fabrication; and assembly, testing, and packaging. 
 + 
 +##Ion implanters 
 +Ion implanters embed impurities (called dopants) into parts of wafers to change their properties. 
 + 
 +##NAND 
 +NAND flash is a memory chip that stores memory permanently, even when power is turned off. 
 + 
 +##OSAT 
 +Outsourced semiconductor assembly and test (OSAT) firms perform assembly, testing, and packaging for third-party customers. 
 + 
 +##Packaging 
 +Packaging involves attaching a manufactured chip to an encasing package. 
 + 
 +##Photomasks 
 +Photomasks are transparent plates featuring a circuit pattern through which photolithography equipment directs light in order to transfer this pattern onto the chip. Each photomask is specific to one chip design. 
 + 
 +##Photoresist 
 +Photoresists are chemicals deposited on a wafer that selectively dissolve to form the circuit pattern when exposed to patterned light that has passed through a photomask after being generated by a photolithography tool. 
 + 
 +##Resist processing tools 
 +Resist processing tools, also called "tracks," coat photoresists on wafers (typically by spin-coating, which spins the wafer to spread deposited photoresist), develop them (dissolve portions hit by light), and bake them (harden undissolved photoresist to prepare for etching).  
 + 
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