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| intro_wafer [2026/05/08 15:36] – [Functional unit and reference flows] gauthier.roussilhe.ext | intro_wafer [2026/05/13 17:01] (current) – [Database and tools] gauthier.roussilhe.ext | ||
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| #### What are the already existing data (dataset, parametric model, paper, etc.)? | #### What are the already existing data (dataset, parametric model, paper, etc.)? | ||
| - | Pirson et al provide a comprehensive review of historical and actual trends regarding environmental impacts of IC production per technology nodes and based on scientific literature and LCA databases[(Pirson, | + | |
| + | Regarding front-end manufacturing, | ||
| <figure right|fig_pirson> | <figure right|fig_pirson> | ||
| Line 103: | Line 104: | ||
| </ | </ | ||
| - | Furthermore, | + | Furthermore, |
| * [[https:// | * [[https:// | ||
| - | * [[https:// | ||
| * [[https:// | * [[https:// | ||
| + | * [[https:// | ||
| + | |||
| + | Several parametric models are also available from industry specialists: | ||
| + | * [[https:// | ||
| + | * [[https:// | ||
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| * [Back-end manufacturing flow](back-process-flow.md) | * [Back-end manufacturing flow](back-process-flow.md) | ||
| * [Back-end processes](back-end.md) | * [Back-end processes](back-end.md) | ||
| + | * [3D NAND use case](3dnand-case.md) | ||
| + | * [DRAM use case](dram-case.md) | ||