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| intro_wafer [2026/06/22 15:09] – [WG status] gauthier.roussilhe.ext | intro_wafer [2026/07/07 19:53] (current) – [WG status] gauthier.roussilhe.ext |
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| ## WG status | ## WG status |
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| This working group focuses on the life cycle inventory of semiconductor manufacturing. We look specifically at wafer and photomask manufacturing, front-end and back-end processes for logic and memory devices. | This working group focuses on the life cycle inventory of semiconductor manufacturing. We look specifically at wafer and photomask manufacturing, front-end and back-end processes for logic and memory devices |
| | . |
| | ### Tasks status |
| | |
| | | **WG tracks** | **Reference contact** | **Priority** | **Status** | **In process tasks** | |
| | | Front-end manufacturing | Gauthier | High | Validated | Modelisation approach (v1) | |
| | | | | High | Almost complete | Characterisation of inputs and outputs by process type | |
| | | | | High | In progress | Recovery of missing model parameters | |
| | | | | High | In progress | Recovery of recipe archetype per device | |
| | | | | High | In progress | Contacting manufacturers and laboratories to obtain average data by process type | |
| | | Back-end manufacturing | Arthur | High | In progress | To be filled by Arthur | |
| | | Wafer manufacturing | Gauthier | Medium | In queue | To be started by Matthieu | |
| | | Photomask manufacturing | Gauthier | Low | Not started | To be started, dependant of photomask recovery for elemental analysis | |
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| <table><thead><tr><th>**WG tracks**</th><th>**Reference contact**</th><th>**Priority**</th><th>**Status**</th><th>**In process tasks**</th></tr></thead><tbody><tr><td rowspan="5">Front-end manufacturing</td><td rowspan="5">Gauthier</td><td rowspan="5">High</td><td>Validated</td><td>Modelisation approach (v1)</td></tr><tr><td>Almost complete</td><td>Characterisation of inputs and outputs by process type</td></tr><tr><td>In progress</td><td>Recovery of missing model parameters</td></tr><tr><td>In progress</td><td>Recovery of recipe archetype per device</td></tr><tr><td>In progress</td><td>Contacting manufacturers and laboratories to obtain average data by process type</td></tr><tr><td>Back-end manufacturing</td><td>Arthur</td><td>High</td><td>In progress</td><td>To be filled by Arthur</td></tr><tr><td>Wafer manufacturing</td><td>Gauthier</td><td>Medium</td><td>In queue</td><td>To be started by Matthieu</td></tr> | |
| <tr><td>Photomask manufacturing</td><td>Gauthier</td><td>Low</td><td>Not started</td><td>To be started, dependant of photomask recovery for elemental analysis</td></tr></tbody></table> | |
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| ### Members | ### Members |
| * Olivier Soldano, Inria | * Olivier Soldano, Inria |
| * Thibault Simon, Resilio | * Thibault Simon, Resilio |
| | * Matthieu Elizalde, Evea |
| | * William Voghel, CIRAIG |
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| | |
| | ## Important pages |
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| | * [Modelization strategy](modelization-strategy.md) |
| | * [Front-end manufacturing concepts](fab-process-flow.md) |
| | * [Front-end processes](front-end.md) |
| | * [Back-end manufacturing concepts](back-process-flow.md) |
| | * [Back-end processes](back-end.md) |
| | * [3D NAND recipe use case](3dnand-case.md) |
| | * [DRAM recipe use case](dram-case.md) |
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