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3D DRAM manufacturing
Xiao1) provides the most detailed description of the processes used to manufacture 3D DRAM and NAND devices. Such a detailed public explanation is rare to find and applies only to two types of devices for advanced technology nodes. Nevertheless, it provides a detailed understanding of the various process loops for each mask.
1)
Xiao, H. (2016). 3D IC Devices, Technologies, and Manufacturing. SPIE press.
Discussion